Functional oxide films
The ALD (Atomic Layer Deposition) method allows various oxide films to be obtained (including ZnO, Al2O3, ZrO2, MgO, Ga2O3, TiO2, HfO2 and multicomponent films). Within the scope of the work, team members have developed films with various functionalities, including antibacterial, hydrophobic, anti-corrosive, mechanical resistance enhancement or improving the thermal insulation properties of glass.